Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing

Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing

Blog Article

Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing.In this paper an 15-fc0093dx accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides.In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously rose jelly beans achieving high integration capabilities, small dimensions and low cost.An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes.

Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.